| NEW Pelcotec™ CDMS-XY-1 | NEW Pelcotec™ CDMS-XY-0.1 | |
| Substrate: Silicon | ✓ | ✓ |
| Substrate size: 2.5 x 2.5mm | ✓ | ✓ |
| Substrate thickness: 675 ±25µm | ✓ | ✓ |
| Feature size: 2mm to 1µm | ✓ | ✓ |
| Feature size: 500, 250 and 100nm | — | ✓ |
| Feature material: 50nm Cr (2mm - 5µm) | ✓ | ✓ |
| Feature material: 20nm Cr/50nm Au (2µm and 1µm) | ✓ | ✓ |
| Feature material: 20nm Cr/50nm Au (500, 250 and 100 nm) | — | ✓ |
| NIST traceable | ✓ | ✓ |
| Certification available | ✓ | ✓ |
| Unmounted | ✓ | ✓ |
| Mounts A-R available | ✓ | ✓ |
| Precision better than 0.3% | ✓ | ✓ |